Title: Micro optics and Optical MEMS
Speaker: Dr Diogo Aguiam
Moderator: Prof. Marco Piccardo, INESC MN
When: April 18, 2024 @ 11h00 a.m.
Where: INESC Lx Auditorium (room #9)

ABSTRACT: Arbitrarily designed multilevel microstructures can directly manipulate the light wavefront to reproduce complex optical functions, enabling more compact optical assemblies and microsystem integration. Greyscale lithography is an enabling laser writing technique to reliably produce 2.5D features for microlenses, diffractive optical elements and self-aligned multilevel features for MEMS devices, compatible with nanoimprint replication and direct pattern transfer to silicon or glass substrates. The combination of micro optical elements with MEMS devices can expand optical functionality, tunability range and device sensitivity. In this talk we go over the recent micro optics and optical MEMS developments for LIDAR, automotive, and manufacturing applications, and present trends for photonics and MEMS integration for improved environmental sensing performance.